8/5/2023 0 Comments Pdf raster scan mems laser![]() This offers a potential technique for characterising production quality or lifetime testing for the MEMS produced.1 Introduction 1.1 Brief History 1.2 The Laws of Reflection and Refraction 1.2.1 Law of reflection 1.2.2 Law of refraction 1.2.3 Intersection of a ray and a plane mirror 1.3 Scan Field and Scan Patterns 1.3.1 Modeling mirror-scanning devices 1.3.2 Elementary concepts of scan field distribution 1.3.3 Optical distortions in scan patterns 1.3.4 Resolution of laser scanners Bibliography and Links SiC provides a more robust platform for electronics, while Ge offers better resonant properties. The stress measured from the resonant frequencies agrees well with that calculated from the growth conditions. Two dimensional scanning of the sample enables visualisation of each mode. We present work using laser interferometry to characterise the resonant modes of membranes produced from Ge or silicon carbide (SiC) on a Si substrate, with the membranes typically having around 1 mm lateral dimensions. It is essential to ensure that the membranes are robust against shock and vibration, with well-characterised resonant frequencies, prior to any practical application. ![]() ![]() Such membranes are a very simple micro-electronic mechanical system (MEMS). Modification of these materials so that a suspended membrane layer is formed, through removing regions of the Si substrate, offers the potential for sensors with a more rapid response and higher sensitivity. Germanium (Ge) on Silicon (Si) has the potential to produce a wide variety of devices, including sensors, solar cells and transistors. ![]()
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